ASM Lithography Holding N.V. Completes Acquisition of Silicon Valley Group, Inc.

Business Editors

VELDHOVEN, The Netherlands--(BUSINESS WIRE)--May 22, 2001

ASM Lithography Holding N.V. (Euronext Amsterdam N.V.:ASML) (Nasdaq:ASML) announced today that it has completed its previously announced acquisition of Silicon Valley Group, Inc. The merger creates a leading provider of equipment to the semiconductor industry. Located in the United States, SVG becomes a wholly owned subsidiary of ASML.

Doug Dunn, Chief Executive Officer of ASML, said: "We are very pleased we have finally closed this milestone transaction. This combination brings together the technical competence of two important players in the market that will significantly enhance our technology potential and leverage future R&D efforts in next generation semiconductor technologies.

By combining the core competencies of SVG's speed to market of new advanced technologies and ASML's ability to introduce and ramp up production of best-in-class volume production tools, ASML will be even better positioned to deliver the most advanced semiconductor technology to customers worldwide. In addition, by diversifying our customer base and broadening our capabilities, the merger helps both companies further adapt to the cyclical nature of the industry."

"The semiconductor industry is at a critical juncture and is in need of faster, more powerful semiconductor chips to fuel the industry's growth. We believe that this merger will provide ASML with the strengthened capabilities to be a major player in driving the next phase of semiconductor technological advancement and are therefore very optimistic about our future long-term growth prospects," concluded Mr. Dunn.

Merrill Lynch & Co. advised ASML on this transaction and Credit Suisse First Boston advised SVG.

About ASML

ASML, founded in 1984, is an important supplier of advanced lithography systems that are essential in the fabrication of integrated circuits. The company is publicly traded on both the Euronext Amsterdam N.V. and the Nasdaq Stock Market(R) under the symbol "ASML." Visit the company's web site at www.asml.com for more information.

SVG, headquartered in San Jose, California, with operations in Wilton, Connecticut, designs, manufactures and markets technically sophisticated lithographic equipment used in the primary stages of semiconductor manufacturing and suppliers wafer processing equipment for the worldwide semiconductor industry.