ALTIS SEMICONDUCTORS AND NOVA TO IMPLEMENT PROCESS CONTROL INFRASTRUCTURE.ALTIS Semiconductor and Nova Measuring Instruments Ltd. (NASDAQ NASDAQin full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : NVMI) are in the process of implementing a data management tool, the NovaNet, to handle process control of CVD/CMP fab operation. The implementation of the new system by ALTIS, a joint subsidiary of IBM's Microelectronics division and Infineon Technologies For the raceway, see . Infineon Technologies AG (ISIN: DE0006231004, FWB: IFX, NYSE: IFX) was founded in April 1999 when the semiconductor operations of parent company, Siemens AG, were spun off to form a separate legal entity. , will complement Nova's Integrated Thickness Monitoring (ITM ITM See: In-the-money ) systems already installed and running in the 0.18 micron ALTIS Semiconductor fab See fab. in Corbeil-Essonnes, France. The combined systems will form a unified process control system for the global CVD/CMP module. Nova's systems measure every wafer immediately after it has been processed. Self-adjusting process control algorithms are using this high sampling rate and information on previously measured wafers to predict the required process parameters of the next wafer. This wafer-to-wafer closed loop feedback control can be applied separately to both CVD CVD Cardiovascular disease, see there and CMP CMP (cytidine monophosphate): see cytosine. (1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information processes. Further, information on each specific wafer's film thickness from the CVD, has been fed forward to the CMP production cell. This data provides compensation for CVD chamber-to-chamber variations, enabling a tighter process window. A network infrastructure is used to supply both CVD and CMP post process measurement results to the fab host for further analysis by statistical tools. Altis Semiconductor, a joint subsidiary of IBM (International Business Machines Corporation, Armonk, NY, www.ibm.com) The world's largest computer company. IBM's product lines include the S/390 mainframes (zSeries), AS/400 midrange business systems (iSeries), RS/6000 workstations and servers (pSeries), Intel-based servers (xSeries) Microelectronics Division and Infineon Technologies, was created in July 1999. This new company was founded at the former IBM semiconductor manufacturing site located at Corbeil-Essonnes, France. Its leading edge technology includes Logic components of 0.18 microns using copper interconnects and advanced memory components (64 and 256 Mb DRAM). Nova Measuring Instruments Ltd. is a recognized market leader in integrated process control for the semiconductor manufacturing industry. The company provides a broad range of integrated solutions to link between different IC processes and equipment manufacturers. |
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