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ADVISORY/Etec Unveils New MEBES eXara Electron-Beam Maskwriting System for Nanometer-Era Chips.


Business Editors & High-Tech Writers

ADVISORY...for Thursday (Sept. 27)

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--(BUSINESS WIRE)

Etec Systems Inc., an Applied Materials Applied Materials, Inc. NASDAQ: AMAT (HKSE: 4336 ) is the global leader in nanomanufacturing technology solutions with a broad portfolio of innovative equipment, service and software products for the fabrication of semiconductor chips, flat panel solar displays, solar  Inc. company, announces the MEBES(R) eXara(tm) system, a new mask pattern generation solution for 100nm mask production and 70nm mask development. The eXara is based on the company's new MEBES X platform architecture developed in partnership with International SEMATECH SEMATECH Semiconductor Manufacturing Technology . The eXara system's high resolution 50kV electron optics electron optics
n. (used with a sing. verb)
The science of the control of electron motion by electron lenses in systems or under conditions analogous to those involving or affecting visible light.

Noun 1.
 and precise raster-based writing strategy provide superior linewidth control and image placement accuracy with high productivity, independent of pattern density and optical proximity correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The two most common applications for OPC are linewidth differences between features in regions of different density (e.  (OPC (1) (OpenGL Performance Characterization) A project group within GPC that manages OpenGL benchmarks. OPC endorses the Viewperf and GLperf benchmarks. Viewperf was created by IBM and OPC provides viewsets for it, which are combinations of tests using specific ) complexity.

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Publication:Business Wire
Date:Sep 27, 2001
Words:179
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