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ADE to Highlight New Film Inspection, MRAM and Optical Flatness Systems at Semicon Korea.


Business Editors/High-Tech Writers

SEMICON SEMICON Semiconductors Equipment and Material International Conference  Korea 2003

Booth # 1168

WESTWOOD, Mass.--(BUSINESS WIRE)--Jan. 21, 2003

ADE Corporation (Nasdaq: ADEX ADEX Athens Derivatives Exchange (Athens, Greece)
ADEX Air Defense Exercise
ADEX Advertisement Expenditure
ADEX Asociaciã³n de Exportadores (Peru) 
), a leading supplier of production metrology and inspection systems for the semiconductor wafer, semiconductor device, magnetic storage and optics manufacturing industries manufacturing industries nplindustrias fpl manufactureras

manufacturing industries nplindustries fpl de transformation

, today announced that the Company is showcasing several of its new products at Semicon Korea, which is being held this week. Among the products the company is highlighting are the Film Inspection Tool(TM) for particle and defect detection on blanket films, WaferSight(TM) wafer flatness system for 35nm technology, and the V300 Wafer Mapper for measuring the most advanced magnetic structures used in MRAM (Magnetic RAM) A non-volatile, random access memory technology that is designed to initially replace flash memory and, potentially, DRAM memory. MRAM uses magnetic, thin film elements on a silicon substrate that can be built on the same chip with the logic circuits.  production.

The Film Inspection Tool offers superior defect detection capability on a wide variety of film types, including dielectrics and metals. The tool provides accurate defect discrimination that allows the user to reduce the cost of test wafers and shorten the feedback loop in process control. The film system's superior performance in the area of defect discrimination is the result of successfully deploying ADE's intellectual property onto existing hardware and software platforms to meet new inspection requirements. These requirements go beyond the traditional defect detection of the current standard inspection systems.

The WaferSight system, a new wafer flatness and shape production metrology tool from ADE Phase Shift, allows wafer and device manufacturers to meet ITRS ITRS International Technology Roadmap for Semiconductors
ITRS International Terrestrial Reference System
ITRS International Transaction Reporting System (EU)
ITRS International Technical Rescue Symposium
 metrology requirements down to the 35nm generation. Utilizing optical technologies, the WaferSight system extends ADE's market dominance Market dominance is a measure of the strength of a brand, product, service, or firm, relative to competitive offerings. There is often a geographic element to the competitive landscape.  of wafer dimensional metrology, leveraging 30 years of industry leadership with detailed knowledge of process and market requirements.

The V300 Wafer Mapper utilizes patented technology that measures the most advanced magnetic structures used in MRAM on wafers up to 300mm. The tool's patented Vector Kerr feature provides manufacturers with an in-depth view of critical magnetic parameters immediately after deposition of the complex magnetic layer structure. These maps provide a first look into the quality of the magnetic structures and predict their complex interactions.

During Semicon Korea, ADE will also showcase leading-edge production metrology systems for 300mm silicon, epi and SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs.  wafer production, including the AFS A distributed file system for large, widely dispersed Unix and Windows networks from Transarc Corporation, now part of IBM. It is noted for its ease of administration and expandability and stems from Carnegie-Mellon's Andrew File System.

AFS - Andrew File System
(TM) Advanced Flatness System and its AWIS AWIS Association for Women in Science
AWIS Alexa Web Information Service
AWIS Army WWMCCS Information System
AWIS Advanced Wafer Inspection System (ADE Corporation)
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(TM) Surface Inspection products for wafer quality certification and process control. ADE will also demonstrate the Company's AcuMap(TM) and NanoMapper(R) tools. High-speed mapping of dielectrics is provided by ADE's AcuMap system for thick, thin, and ultra-thin SOI layers, photoresist, and CMP CMP (cytidine monophosphate): see cytosine.


(1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information
 applications. Nanotopography, an increasingly important factor in device yield improvement, is characterized by the NanoMapper system for the 100nm production node and below. The NanoMapper system, the winner of the prestigious R&D 100 Award, is the industry standard for 300mm wafers. These systems include field-proven, full-factory automation hardware and software options.

ADE also offers the Acudep 300 Advanced Particle Deposition System, which allows users to create NIST-traceable particle calibration standards in house, improving quality control and reducing costs.

To learn more about these and other products of ADE, please visit us at Semicon Korea, January 21-23, 2003 Booth # 1168, Atlantic Hall, Floor 3, (Bytech, Inc.)

About ADE Corporation

ADE Corporation is a leading supplier of metrology and inspection systems for the silicon wafer and magnetic data storage, and optics manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing process steps for yield enhancement, providing quality certification data that is relied upon by semiconductor wafer, device and computer disk manufacturers. The Company's systems also are used for production measurements in the semiconductor chip fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 process. To learn more about ADE, visit the Company's Web site at http://www.ade.com.
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Publication:Business Wire
Geographic Code:1USA
Date:Jan 21, 2003
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