ADE Unveils WaferSight Optical Wafer Flatness System For 35nm Technology.Business/Technology Editors SEMICON SEMICON Semiconductors Equipment and Material International Conference West 2002 ADE Corporation (Nasdaq: ADEX ADEX Athens Derivatives Exchange (Athens, Greece) ADEX Air Defense Exercise ADEX Advertisement Expenditure ADEX Asociaciã³n de Exportadores (Peru) ), a leading supplier of wafer measurement and inspection systems for the silicon wafer and computer disk manufacturing industries manufacturing industries npl → industrias fpl manufactureras manufacturing industries npl → industries fpl de transformation , will introduce its WaferSight(TM) system, a new optical-based wafer flatness and shape metrology solution, at SEMICON West 2002 in San Francisco San Francisco (săn frănsĭs`kō), city (1990 pop. 723,959), coextensive with San Francisco co., W Calif., on the tip of a peninsula between the Pacific Ocean and San Francisco Bay, which are connected by the strait known as the Golden , July 22-24. The WaferSight production metrology tool, designed and produced by ADE Phase Shift (Tucson, AZ), a wholly owned subsidiary Wholly Owned Subsidiary A subsidiary whose parent company owns 100% of its common stock. Notes: In other words, the parent company owns the company outright and there are no minority owners. of ADE Corporation, allows wafer and device manufacturers to meet ITRS ITRS International Technology Roadmap for Semiconductors ITRS International Terrestrial Reference System ITRS International Transaction Reporting System (EU) ITRS International Technical Rescue Symposium requirements down to the 35nm generation for 300mm and advanced 200mm wafers. ADE President and Chief Executive Officer Dr. Chris L. Koliopoulos said, "Utilizing our advanced optical technology, the WaferSight system extends ADE's market dominance in wafer dimensional metrology and leverages our 30-year history of industry leadership. This product demonstrates our ability to offer equipment that is a step ahead of process and market requirements and offers cost-of-ownership benefits by supporting multiple generations of the ITRS roadmap." The WaferSight design uses non-contact optical interferometry to simultaneously measure the height variations on both front and back surfaces of double-side polished wafers. These two high resolution surface height maps are combined to produce wafer flatness and shape maps to meet specifications for future deign deign v. deigned, deign·ing, deigns v.intr. To think it appropriate to one's dignity; condescend: wouldn't deign to greet the servant who opened the door. nodes. Flexible, recipe-driven, multi-tasking production software processes the flatness and shape information to make SEMI standard data reports for both global and site parameters. The WaferSight system includes a complete set of factory automation options, including standard 100% edge-grip wafer handling using ADE's modular platform architecture. About ADE Corporation, Inc. ADE Corporation is a leading supplier of metrology and inspection systems for the silicon wafer, semiconductor device and computer disk manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing process steps for yield enhancement, providing quality certification data that is relied upon by semiconductor and computer disk manufacturers. The Company's systems also are used for production measurements in the semiconductor chip fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. process. To learn more about ADE and its complete line of products, visit booth 1302 at Semicon West 2002, or visit the Company's Web site at http://www.ade.com. |
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