ADE Receives Order for Multiple 300mm Wafer Advanced Flatness Systems from Major Japanese Wafer Maker.

Business Editors/High-Tech Writers

WESTWOOD, Mass.--(BUSINESS WIRE)--Jan. 13, 2003

ADE Corporation (Nasdaq: ADEX), a leading supplier of production metrology and inspection systems for the semiconductor wafer, semiconductor device, magnetic storage and optics manufacturing industries, announced today that the Company has received a multi-million dollar order for multiple AFS 300mm advanced wafer flatness measurement and sorting systems from a major Japanese wafer supplier. These systems, which are expected to be delivered over the next three months, will support expansion of the customer's 300mm wafer production.

The ADE Corporation 300mm AFS Advanced Flatness System is the industry standard for non-contact wafer geometry measurement. These multifunctional silicon wafer sorters simultaneously measure and report SEMI standard wafer shape, flatness, thickness and resistivity results for silicon quality and process control applications. Since its introduction, the AFS Advanced Flatness System has become the semiconductor industry's tool of record and certification standard for 300mm polished wafer production. Current applications for the AFS Advanced Flatness System also include ultra-thin SOI, epitaxial, pre-polish and reclaim wafering operations for process setup, inline quality control, and product certification.

Stated Dr. Chris L. Koliopoulos, ADE President and Chief Executive Officer, "This repeat order from one of the world's major silicon manufacturers reconfirms that the AFS Advanced Flatness System is the tool of choice for wafer metrology, supplying the best combination of measurement results, production throughput, and integrated factory automation. No other company, large or small, provides the depth and breadth of wafer metrology knowledge and experience that allows ADE to continue its market leadership. By providing superior production measurement and detection results and minimizing cost of ownership, we continue to meet the needs of leading-edge silicon and device manufacturers."

ADE will feature the AFS Advanced Flatness System, along with its full line of production semiconductor metrology and inspection systems, at the SEMICON Korea 2003 exhibition, January 21-23, 2003, at the Bytech Inc. booth # 1168, in the Atlantic Hall, 3rd floor.

About ADE Corporation, Inc.

ADE Corporation is a leading supplier of metrology and inspection systems for the silicon wafer, semiconductor device, magnetic data storage, and optics manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing process steps for yield enhancement, providing quality certification data that is relied upon by semiconductor wafer, device and computer disk manufacturers. The Company's systems also are used for production measurements in the semiconductor chip fabrication process. To learn more about ADE, visit the Company's Web site at http://www.ade.com.

This news release contains certain forward-looking statements that are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Those statements that make reference to the Company's expectations, predictions, assumptions and anticipations should be considered forward-looking statements. These statements include, but are not limited to, those associated with the timing of ADE's AFS shipment to its customer, and the demand for and competitive advantage of ADE's AFS tool. These statements involve risks and uncertainties including those associated with the strength of the semiconductor market, wafer pricing and wafer demand, the results of its product development efforts, the success of ADE's product offerings to meet customer needs within the timeframes required by customers in these markets, further increases in backlog, and the Company's ability to increase gross margins. Further information on potential factors that could affect ADE Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended April 30, 2002.