ADE Receives Multi-Million Dollar Order From a Major Silicon Wafer Supplier; Wafer Inspection, Measurement and Yield Management Tools Support 300mm Fab Expansion in North America.

WESTWOOD, Mass. -- ADE Corporation (NASDAQ: ADEX) announced today that it has received a multi-million dollar order for 300mm production wafer quality certification and process control systems, including wafer geometry measurement, surface inspection and defect classification, and the new FabVision(TM) yield management and database system, from a major semiconductor wafer supplier. Delivery of these tools is expected to be completed in calendar 2006 to support the customer's first 300mm wafer production fab in the United States.

"This multi-million dollar order, encompassing ADE's broad range of in-line wafer metrology, inspection and yield management products continues to reflect the growth of 300mm wafer capacity and represents the first expansion of 300mm silicon wafer production in the United States," said Dr. Chris L. Koliopoulos, ADE's president and chief executive officer. "Through the adoption of this tool set by this major wafer supplier, ADE is committed to help the customer ramp up 300mm wafer production in a timely manner, to successfully achieve its yield entitlements for this initial investment in the United States."

Gartner Dataquest predicts that 300mm wafer demand will grow by 41% in 2006 and by an additional 20% in 2007. Nineteen new 300mm semiconductor device fabs are planned either to begin or to ramp production between 2006 and 2008.

ADE's full line of production metrology and inspection equipment enables high yield with low cost of ownership and a smooth transition between technology nodes for wafer suppliers, incoming quality control and semiconductor equipment manufacturers.

About ADE Corporation

ADE Corporation is a leading supplier of metrology and inspection systems for the semiconductor wafer, semiconductor device, magnetic data storage and optics manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing steps for yield enhancement, providing quality certification data that is relied upon by semiconductor wafer, device and computer disk manufacturers. The Company's systems also are used for production measurements in the semiconductor chip fabrication process. To learn more about ADE, visit the Company's Web site at www.ade.com.

Safe Harbor 

This news release contains certain forward-looking statements that are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Those statements that make reference to the Company's expectations, predictions, beliefs, assumptions and anticipations should be considered forward-looking statements. These statements include, but are not limited to, those associated with the shipment of product to the aforementioned silicon wafer supplier, the effect of ADE products on customer product quality and production rates, and expected 300mm silicon wafer demand. These statements involve risks and uncertainties including those associated with wafer pricing and wafer demand; the results of its product development efforts; and the success of ADE's product offerings to meet customer needs within the timeframes required by customers in these markets. Further information on potential factors that could affect ADE Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended April 30, 2005.