ADE Corporation Receives Multi-System Order From Major Wafer Supplier; Production Metrology Tools to Support 200mm Capacity Expansion in Asia.

Business Editors/High-Tech Writers

WESTWOOD, Mass.--(BUSINESS WIRE)--Sept. 25, 2003

ADE Corporation (NASDAQ: ADEX), announced today that it has received a significant order from a major wafer supplier for multiple wafer measurement and sorting systems.

The order includes multiple UltraScan(R) 9650FA wafer geometry measurement and sorting systems, along with technology and productivity upgrades to existing UltraScan production systems. The delivery of these systems will be completed by the first quarter of calendar 2004 to support increased 200mm polished wafer production in Asia.

"We continue to see wafer manufacturers add capacity and enhance productivity in existing 200mm fabs as wafer demand continues to climb," said Dr. Chris L. Koliopoulos, ADE's president and chief executive officer. "The trend toward increasing wafer capacity at 200mm and 300mm over the past year indicates continuing opportunity for growth at ADE and represents positive signs in the industry. ADE remains committed to supporting our customers' current and future metrology and inspection requirements for improved yields."

About ADE Corporation

ADE Corporation is a leading supplier of metrology and inspection systems required for production in the silicon wafer, semiconductor device, magnetic data storage and optics manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing process steps for yield enhancement, providing quality certification data that is relied upon by semiconductor wafer, device and computer disk manufacturers. The Company's systems also are used for production measurements in the semiconductor chip fabrication process. To learn more about ADE, visit the Company's Web site at http://www.ade.com.

This news release contains certain forward-looking statements that are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Those statements that make reference to the Company's expectations, predictions, assumptions and anticipations should be considered forward-looking statements. These statements include, but are not limited to, those associated with the Company's shipment of products to its customers and future demand for ADE's wafer metrology systems. These statements involve risks and uncertainties including those associated with the strength of the semiconductor and device markets, wafer pricing and wafer demand, the results of its product development efforts, the success of ADE's product offerings to meet customer needs within the timeframes required by customers in these markets. Further information on potential factors that could affect ADE Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended April 30, 2003 and its subsequent 10-Q filing.