ADE Corporation Introduces X9 Magnetic Properties Analysis System; Receives Multiple-unit Order.

Business/Technology Editors

WESTWOOD, Mass.--(BUSINESS WIRE)--Oct. 9, 2001

ADE Corporation (Nasdaq: ADEX), a leading supplier of metrology and inspection systems for the silicon wafer and data storage industries, announced today that it has received orders for multiple units of its recently introduced X9 Magnetic Properties Analysis System from a leading manufacturer of magnetic heads. Developed by ADE Technologies, Inc., a subsidiary of ADE Corporation, the X9 is a computer-controlled measurement system capable of fully characterizing thin film magnetic head materials without operator involvement.

"ADE's X9 system is the latest in a long line of next-generation measurement, inspection and metrology products that the Company has brought to market during the past 34 years," stated ADE President and Chief Executive Officer Robert Abbe. "The X9 can be used in both the advanced development and production process control for the most advanced GMR-type magnetic heads. This proprietary technology underscores the valuable contribution of ADE employees, as well as ADE's continuing commitment to our customers to deliver superior metrology solutions which maximize manufacturing productivity. The applicability of the X9 extends to a variety of advanced and multilayer magnetic thin film technologies such as TMR heads and MRAM. We believe that the X9 will contribute to the Company's technology lead and dominant market share in the months and years ahead."

In a single step, the X9 has the ability to automatically calibrate and run both hysteresis and magneto-resistance loops at high and low magnetic fields, allowing for the determination of many parameters including Pinned Layer Exchange and Thickness, Free Layer Exchange and Thickness, Free Layer Coercivity and all transport properties.

The X9 provides the ability to quickly measure thin films with repeatability equivalent to 0.25 A of NiFe, which is critically important in order to achieve the degree of process control required for the fabrication of advanced magnetic memory materials. The X9 combines a field resolution of 0.001 Oe with a maximum field of 20,000 Oe, surpassing all alternative metrology systems. In addition, the X9 is fully automated and can load, measure, and unload samples from cassettes eliminating operator dependence. The tool features powerful software to measure and analyze complex magnetic structures. It can be equipped with a SECS/GEM interface and includes a comprehensive data analysis package for full parameter extraction and analysis.

About ADE Corporation, Inc.

ADE Corporation is a leading supplier of metrology and inspection systems for the silicon wafer and data storage industries. The Company's systems analyze and report product quality at critical manufacturing process steps and provide quality certification data that is relied upon by semiconductor and data storage manufacturers. The Company's systems also are used in the fabrication of integrated circuits. To learn more about ADE, visit the Company's Web site at www.ade.com.

This news release contains certain forward-looking statements that are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Those statements that make reference to the Company's expectations, predictions and anticipations should be considered forward-looking statements. These statements include, but are not limited to the contribution that the X9 makes to the Company's technology lead and market share. These statements involve risks and uncertainties including those associated with the strength of the semiconductor and hard disk markets, wafer pricing and wafer demand, the results of its product development efforts, the success of ADE's product offerings to meet customer needs within the timeframes required by customers in these markets, further increases in backlog, our visibility, and the Company's predictions of future financial outcomes. Further information on potential factors that could affect ADE Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended April 30, 2001.