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A T M I's Sub-Atmospheric Gas Sources Now Preferred Standard; Factory Mutual Specifies A T M I Products as Preferred Gas Storage & Delivery Method.


Business Editors

DANBURY, Conn.--(BUSINESS WIRE)--April 25, 2000

A T M I, Inc. (Nasdaq:ATMI ATMI American Textile Manufacturers Institute
ATMI Association for Technology in Music Instruction
ATMI Advanced Technology Materials, Inc.
ATMI Application-to-Transaction Manager Interface
ATMI According to My Information
ATMI Atm Interface Unit
), today announced that its sub-atmospheric gas storage and delivery product lines -- known as the SDS 1. (company) SDS - Scientific Data Systems.
2. (tool) SDS - Schema Definition Set.
(R) (Safe Delivery Source) and SAGE sage, any species of the large genus Salvia, aromatic herbs or shrubs of the family Labiatae (mint family). The common sage of herb gardens is S. officinalis, a strongly scented shrubby perennial, native from S Europe to Asia Minor. (R) (Sub-Atmospheric Gas Enhanced) Gas Sources -- are the preferred method to safely store and deliver dopant dopant

Any impurity added to a semiconductor to modify its electrical conductivity. The most common semiconductors, silicon and germanium, form crystalline lattices in which each atom shares electrons with four neighbours (see bonding).
 gases for semiconductor processing, as specified by Factory Mutual Engineering Corp.

Factory Mutual's latest (September 1999) Property Loss Prevention Data Sheets states: "Sub-atmospheric dopant gas sources should be used instead of high pressure cylinder sources whenever process compatibility will allow."

Factory Mutual Research is a world-renowned organization with over 100 years' experience in advancing property loss prevention through scientific research, independent third-party product testing, and the development of engineering guidelines guidelines,
n.pl a set of standards, criteria, or specifications to be used or followed in the performance of certain tasks.
. Factory Mutual Research Approval indicates to a company's clients that a product conforms to the highest industry and property protection standards and will continue to meet those standards.

Dennis Brestovansky, A T M I's Vice-President of Gas Product Operations, said, "We welcome Factory Mutual's recognition of the inherent safety benefits of A T M I's sub-atmospheric SDS and SAGE Gas Source technologies. It's a fine addition to the strong reputation these products enjoy, and should help introduce more customers to the production efficiencies of sub-atmospheric gas storage and delivery. This is another feather in the cap for A T M I's internally-developed SDS Gas Source products."

Doug Neugold, A T M I's Executive Vice-President for Materials, said, "A T M I is recognized for the innovative technologies it develops and brings to the semiconductor marketplace. We began initial development work on what is now the SDS Gas Source technology in the late 1980's. Now we are poised to continue to expand the gases and markets we serve with additional sub-atmospheric gas delivery product lines."

SDS Gas Source Background

A T M I introduced its revolutionary sub-atmospheric gas packaging technology in 1994 to the ion implant implant /im·plant/ (im-plant´) to insert or to graft (tissue, or inert or radioactive material) into intact tissues or a body cavity.  market of the semiconductor industry. In 2000, more than 80% of all ion implanters produced in the U.S. are expected to ship ready to use A T M I's sub-atmospheric pressure gas sources.

A T M I's adsorbent adsorbent /ad·sor·bent/ (ad-sor´bent)
1. pertaining to or characterized by adsorption.

2. a substance that attracts other materials or particles to its surface by adsorption.
 technology -- special materials with chemical "hooks"-latches onto the gas molecules. This reduces the gas vapor pressure vapor pressure, pressure exerted by a vapor that is in equilibrium with its liquid. A liquid standing in a sealed beaker is actually a dynamic system: some molecules of the liquid are evaporating to form vapor and some molecules of vapor are condensing to form liquid. , effectively converting it into a "no pressure" material. Gas is released when pulled out by the vacuum that is typical in most semiconductor processes. The sub-atmospheric safety systems allow hazardous semiconductor production gases to be stored and delivered at sub-atmospheric pressures.

By using this novel "no-pressure" technology, industrial customers have realized dramatic risk reductions related to both property loss and personnel health. Independent studies confirm significant productivity benefits. Safety codes and best practices guidelines are now starting to specify A T M I's sub-atmospheric gas sources. A T M I's sub-atmospheric gas sources also contribute additional customer benefits because of relaxed building and fire codes that reflect its inherent safety. This means shorter construction times, lower costs, and improved flexibility for hazardous process material storage and use.

The semiconductor industry's broad acceptance of A T M I's SDS Gas Source technology created demand for additional sub-atmospheric gas delivery systems for previously hazardous high-pressure gases. A T M I introduced its second sub-atmospheric technology, SAGE -- Sub-Atmospheric Gas Enhanced -- for chemical vapor deposition Vapor deposition

Production of a film of material often on a heated surface and in a vacuum. Vapor deposition technology is used in a large variety of applications.
 (CVD CVD Cardiovascular disease, see there ) chip production processes, in 1998.

Factory Mutual is an affiliate of FM Global, the world's largest insurance organization solely dedicated to commercial and industrial property protection. FM Global, through its affiliates and its subsidiaries, specializes in commercial and industrial property insurance and property protection.

A T M I provides specialty materials and related equipment and services to the worldwide semiconductor industry. Related equipment includes materials packaging systems, delivery systems, sensors
  • Thermocouple
  • RTD - Resistance Temperature Detector or Resistance thermometer or Pt100
  • Microphone
  • Hydrophones
  • Seismometers
  • Photoresistor
  • Phototransistor
  • Infrared thermometer
  • Multi-User Multimodal Tabletop Interaction
  • Cationic Sensor
, and a full line of environmental equipment. Services include materials management Materials management is the branch of logistics that deals with the tangible components of a supply chain. Specifically, this covers the acquisition of spare parts and replacements, quality control of purchasing and ordering such parts, and the standards involved in ordering, , equipment servicing, and thin film deposition Placing thin films of material onto metal, ceramic or semiconductor substrates. See sputtering. .

Statements which are not historical information are forward looking, and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or A T M I's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses into A T M I; and other factors discussed in A T M I's filings with the Securities and Exchange Commission. Such risks and uncertainties could cause actual results to differ from those projected.

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Publication:Business Wire
Geographic Code:1USA
Date:Apr 25, 2000
Words:719
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